Semiconductor Characterization: Present Status and Future Needs

Semiconductor Characterization: Present Status and Future Needs

Editorial Reviews
Book Description
Based on papers given at an International Nist Workshop in January 1995, Semiconductor Characterization covers the unique characterization requirements of both silicon IC development and manufacturing, and compound semiconductor materials, devices, and manufacturing. Additional sections discuss technology trends and future requirements for compound semiconductor applications. Also highlighted are recent developments in characterization, including in- situ, in-FAB, and off-line analysis methods. The book provides a concise, effective portrayal of industry needs and problems in the important specialty of metrology for semiconductor technology.

Semiconductor Characterization: Present Status and Future Needs,W. Murray Bullis,D. G. Seiler,A. C. Diebold,Amer Inst of Physics,1563965038,Characterization,Congresses,Design and construction,Electronics - Semiconductors,Physics,Science/Mathematics,Semiconductor Physics,Semiconductors,Technology & Industrial Arts

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Books Info

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