Perspectives, Science and Technologies for Novel Silicon on Insulator Devices (NATO Science Partnership Sub-Series: 3:)
Perspectives, Science and Technologies for Novel Silicon on Insulator Devices (NATO Science Partnership Sub-Series: 3:)
Editorial Reviews
Book Description
This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS.
Readership: Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.
Book Info
Contains the contributions of speakers who attended the NATO Advanced Research Workshop on Perspectives, Science and Technology for Novel Silicon on Inuslar Devices held at the Sanatorium Pushcha Ozerna, Kyiv, Ukraine, October 12-15,1998.
Perspectives, Science and Technologies for Novel Silicon on Insulator Devices (NATO Science Partnership Sub-Series: 3:),Peter L.F. Hemment,Vladimir S. Lysenko,Alexei N. Nazarov,Springer,0792361164,Congresses,Electronic Apparatus And Devices,Electronics - General,Electronics - Semiconductors,General,Physics,Science/Mathematics,Semiconductors,Silicon-on-insulator technolog,Silicon-on-insulator technology,Technology,Technology & Industrial Arts,Technology / Electronics / Circuits / General
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