The Physics of Submicron Lithography (Microdevices)

The Physics of Submicron Lithography (Microdevices)

Editorial Reviews
Book Description
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.

The Physics of Submicron Lithography (Microdevices),Kamil A. Valiev,Springer,0306435780,Electronic Engineering (Specific Aspects),Electronics - Circuits - Printed,Ion beam lithography,Lithography, Electron beam,Optics,Physics,Science,Science/Mathematics,Technology & Industrial Arts,X-ray lithography,Science / Physics

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