Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)

Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)

Editorial Reviews
Book Description
This book looks at the role of plasma processing in the area of semiconductor device fabrication for microelectronics manufacturing, thin films, and materials processing. These technologies are the principal methods of microelectronic component manufacture and as such are important technologies with aggressive industrial and academic research and education programs. Plasma Electronics: Applications in Microelectronic Device Fabrication is the first book for many years to take a detailed look at the physics and applications of low temperature plasma processing in microelectronic device manufacture. It includes a look at the application and transfer of new research developments to the industrial arena.

Plasma Electronics (Series in Plasma Physics),T. Makabe,Z. Petrovic,Taylor & Francis,0750309768,Electronics - General,Engineering - Mechanical,Physics,Plasma engineering,Science,Science/Mathematics,Technology & Industrial Arts,Science / Physics

Books Info:

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Books Info

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