Rapid Thermal Processing for Future Semiconductor Devices

Rapid Thermal Processing for Future Semiconductor Devices

Editorial Reviews
Book Description
This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.

This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.

Rapid Thermal Processing for Future Semiconductor Devices,H. Fukuda,Elsevier Science,0444513396,Acoustics & Sound,Congresses,Electronics - Semiconductors,Engineering - Electrical & Electronic,Heat treatment,Physics,Rapid thermal processing,Science/Mathematics,Semiconductors,Technology,Technology & Industrial Arts,Science / Physics

Books Info:

1. Renormalization Group (Physics Notes)
2. Semiconductor Quantum Well Intermixing: Material Properties and Optoelectronic Applications (Optoelectronic Properties of Semiconductors and Superlattices)
3. Spin Glasses and Random Fields (Directions in Condensed Matter Physics, Vol. 12)
4. Stable Gas in Liquid Emulsions, Volume 19 : Production in Natural Waters and Artificial Media (Studies in Interface Science)
5. Static Fields and Potentials
6. Surfaces, Chemistry and Applications, Volume 2 : Adhesion Science and Engineering (Adhesion Science and Engineering)
7. The Creation of Ideas in Physics : Studies for a Methodology of Theory Construction (The Western Ontario Series in Philosophy of Science)
8. The Golden Age of Theoretical Physics: Selected Essays
9. The N=2 Wonderland: From Calabi-Yau Manifolds to Topological Field Theories
10. The Physics and Chemistry of Mineral Surfaces

Books Info

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