Plasma Deposition of Amorphous Silicon-Based Materials (Plasma-Materials Interactions)
Plasma Deposition of Amorphous Silicon-Based Materials (Plasma-Materials Interactions)
Editorial Reviews
Review
"The book...provides a very useful outline of the underlying properties, processes as well as their applications."
--VACUUM
Review
"The book...provides a very useful outline of the underlying properties, processes as well as their applications."
--VACUUM
Plasma Deposition of Amorphous Silicon-Based Materials (Plasma-Materials Interactions)
Plasma Deposition of Amorphous Silicon-Based Materials (Plasma-Materials Interactions),Pio Capezzuto,Arun Madan,Academic Press,012137940X,Amorphous semiconductors,Design and construction,Electronic Apparatus And Devices,Electronics - Semiconductors,Material Science,Physics,Plasma-enhanced chemical vapor,Plasma-enhanced chemical vapor deposition,Science,Science/Mathematics,Semiconductors,Silicon alloys,Science / Physics
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