Physics of Thin Films (Thin Films)

Physics of Thin Films (Thin Films)

Editorial Reviews
Book Description
This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma.

Key Features
* Chapter One develops a unified framework from which all "high-efficiency" sources may be viewed and compared; outlines key elements of source design affecting processing results; and highlights areas where additional research and development are needed
* Chapter Two reviews and analyzes the main types of electron cyclotron resonance (ECR) plasma sources suitable for ECR PACVD of thin films, mainly ECR sources using magnet coils
* Chapter Three examines the benefits and limitations of the new technique, unbalanced magnetron sputtering (UBM), along with the motivation for its development, the basic principles of its operation and commercial applications, and some speculations regarding the future of UBM technology
* Chapter Four describes general phenomena observed in connection with particle formation in thin film processing plasmas; discusses particles in PECVD plasmas, sputtering plasmas, and RIE plasmas; presents an overview of the theoretical modeling of various aspects of particles in processing plasmas; examines issues of equipment design affecting particle formation; and concludes with remarks about the implications of this work for the control of process-induced particle contamination.

Book Info
Volume 18: Plasma Sources for Thin Film Deposition And Etching, presents articles that discuss in far greater detail the design, physics, and operation of various plasma sources, and their use in the controlled growth and etching of thin films.

Physics of Thin Films (Thin Films),Maurice H. Francombe,John L. Vossen,Academic Press,0125330189,Chemistry - Industrial & Technical,Optics,Physics,Science,Science/Mathematics,Thin Films Physics,Condensed matter physics (liquids & solids),Particle & high-energy physics,Plasma physics,Technology / Optics

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Books Info

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