Low Energy Ion Assisted Film Growth
Low Energy Ion Assisted Film Growth
Editorial Reviews
Book Description
Text serves as an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. Reviews basic concepts related to the interaction of low energy ion beams with materials. For researchers, post-graduates, and engineers with little or no experience in the techniques of thin film deposition.
Book Info
Text serves as an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. Reviews basic concepts related to the interaction of low energy ion beams with materials. For researchers, post-graduates, and engineers with little or no experience in the techniques of thin film deposition.
Low Energy Ion Assisted Film Growth
Low Energy Ion Assisted Film Growth,A. R. Gonzlez-Elipe,F. Yubero,Jose M. Serrano Sanz,Imperial College Press,1860943519,Applied Sciences,Engineering - General,Environmental Engineering & Technology,Material Science,Physics,Science,Science/Mathematics,Solid State Physics,Technology,Applied physics & special topics,Materials science,States of matter
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