Glow Discharge Processes: Sputtering and Plasma Etching

Glow Discharge Processes: Sputtering and Plasma Etching

Editorial Reviews
Book Description
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications—practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

The publisher, John Wiley & Sons
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Glow Discharge Processes: Sputtering and Plasma Etching,Brian Chapman,Wiley-Interscience,047107828X,Electromagnetism,Engineering - Electrical & Electronic,Glow discharges,Physics,Plasma Physics,Plasma etching,Science,Science/Mathematics,Sputtering (Physics),Electricity, magnetism & electromagnetism,Science / Electromagnetism

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