Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)

handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions (materials science and process technology)

more information about Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)

Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)

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Book Description
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology),Stephen M. Rossnagel,Jerome J. Cuomo,William D. Westwood,Noyes Publications,0815512201,Engineering - Chemical & Biochemical,Engineering - Mechanical,Etching,Handbooks & Manuals,Materials For Engineering,Physics,Plasma engineering,Plasma etching,Science/Mathematics,Semiconductors,Technology,Technology & Industrial Arts,Technology: General Issues

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